JEOL JSM 6610 Scanning electron microscope

Main features

• high resolution microstructural observation combined with analytical capabilities
• super conical objective lens
• stage navigation system
• working at low presure10 to 270 Pa
• energy dispersive X-ray analyzer (EDS) OI X-max 50 mm2
• large specimen chamber for a 200mm diameter specimen
• low vacuum secondary electron detector

Basic technical parameters

• resolution - 3.0 nm (30 kV) , 8 nm (3 kV) , 15 nm (1 kV)
• magnification – × 5 to × 300,000 (on 128 mm × 96 mm imagesize)
• accelerating voltage – 0.3kV to 30 kV
• specimen stage - eucentric large-specimen stage axes motorized, x-y: 125 mm x 100 mm, tilt: -10° to ～＋90°, rotation: 360°, working distance: 5 mm to 80 mm